Design and Simulation of RF MEMS Capacitive type Shunt Switch & its Major Applications
نویسندگان
چکیده
This article details about the design of a K-band RF-MEMS capacitive type shunt switch and some of its major applications. The electrostatic and electromagnetic analyses of the designed structure have been performed using MATLAB and commercially available EM solvers. FEM and MOM both tools have been used extensively for full-wave analysis. Two major applications (SPDT switch and reconfigurable Antenna) have been studied here. The design is based upon 675 μm thick high resistive Silicon (ρ > 8KΩ-cm).
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